3-D Diffusion Models for Chemically-Amplified Resists Using Massively Parallel Processors

Acid-Quencher Reaction-Diffusion during the Post-Exposure Bake of Chemically Amplified Resists Part 1: Initially linear concentration profiles

A massively parallel exponential integrator for advection-diffusion models

This work considers the Real Leja Points Method (ReLPM), [M. Caliari, M. Vianello, L. Bergamaschi, Interpolating discrete advection-diffusion propagators at spectral Leja sequences, J. Comput. Appl. Math. 172 (2004) 79–99], for the exponential integration of large-scale sparse systems of ODEs, generated by Finite Element or Finite Difference discretizations of 3-D advection-diffusion models. We...

Use of SU-8 Negative Photoresist for Optical Mask Manufacturing

The requirements for better control, linearity, and uniformity of critical dimension (CD) on photomasks in fabrication of 180 and 150 nm generation devices result in increasing demand for thinner, more etching durable, and more sensitive ebeam resists. Novolac based resists with chemical amplification have been a choice for their sensitivity and stability during etching . However, difficult CD ...

Parallel Simulation of 3 - D Flow and Transport Models within theNOWESP

In this paper, a short overview of project 3 "Advanced Flux Modelling" in the NOWESP project of the MAST II programme is given. The computational requirements of large scale 3-D ow and transport models of the NorthWest European Shelf are considered. The possibilities and implications of massively parallel processors for the simulation of these models are discussed. We also present some of the r...

A Message-Passing Distributed Memory Parallel Algorithm for a Dual-Code Thin Layer, Parabolized Navier-Stokes Solver

In this study, the results of parallelization of a 3-D dual code (Thin Layer, Parabolized Navier-Stokes solver) for solving supersonic turbulent flow around body and wing-body combinations are presented. As a serial code, TLNS solver is very time consuming and takes a large part of memory due to the iterative and lengthy computations. Also for complicated geometries, an exceeding number of grid...